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Rating 4.7 stars (20,331) UC Standardization Committee UC Standard: Test method for measuring surface contamination on silicon wafers by total re ection X-ray uorescence spectroscopy, Ultra Clean Technology, 8, 44 82 (1996) Horie, S et al Progress of ISO standardization activity on TXRF method 1: Report on RRT2 (Collecting method of surface metal) Extended Abstracts (The 48th Spring Meeting 2001), The Japan Society of Applied Physics and Related Societies, Meiji University, 2001, p 839 (31a-D-1) Mori, Y and Uemura, K Error factors in quantitative total re ection X-ray uorescence analysis X-Ray Spectrom, 28, 421 426 (1999) Hourai, M, Naridomi, T, Oka, Y, Murakami, K, Sumita, S, Fujino, N and Shiraiwa, T A method of quantitative contamination with metallic impurities of the surface of a silicon wafer Jpn J Appl Phys, 27, L2361 L2363 (1988) Kondo, H, Ryuta, J, Morita, E, Yoshimi, T. pdf to excel converter free online: Convert PDF to Excel online pdf to excel converter online 500 pages free PDF to Excel Free Online | 100% Secure, Anonymous PDF Converter
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