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For a NSA transistor, the space between the p extrinsic base implant and the n emitter implant dopants can be modi ed by the change in the emitter mask edge In the emitter design, the rst shape is formed to de ne the emitter area Insulator lms are placed to avoid electrical shorting between the emitter and the base regions A small emitter window is formed in the emitter region, opening an area in the insulator stack A polysilicon lm (eg, n doped or undoped) is deposited to form the emitter region This emitter polysilicon conformal lm lls the emitter window and extends over the insulator stack An n implant is performed in the emitter polysilicon to allow its usage as a dopant source The edges of the emitter polysilicon lm and the stack is eliminated to de ne an emitter region.



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By repeated application of Theorem A. 19 one easily arrives at the following result:

Stakeholder attitude (baseline).





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After a thermal process step, the n dopants diffuse out of the emitter polysilicon region, forming the emitter Over the insulator region, the emitter polysilicon overhangs on its edges The emitter polysilicon lm width can be increased with a xed emitter area In this case, as the polysilicon extends outward, the space between the metallurgical junction (formed between the n emitter dopants and the p base region) and the emitter polysilicon edge is increased Given that the extrinsic base p implant is done after the emitter formation, the emitter polysilicon serves as a mask As the polysilicon region extension is increased, the spacing between the p extrinsic base implant and the emitter base metallurgical junction increases In this fashion, a p /p /n diode region is formed at the base emitter junction As the spacing increases, the region of p dopant increases (eg.

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, link resistance area); this serves three purposes from an ESD perspective First, as the p region increases, the base series resistance of the p /p /n region increases In the NSA HBT device, the link resistance increases as the emitter polysilicon width increases and the salicide is moved farther from the emitter Second, in a reverse mode of operation, the heavily doped regions are being spaced farther apart; this leads to a higher metallurgical breakdown voltage as well as lower reverse bias leakage current The increase in the emitter polysilicon region space (eg, the link resistance region) has a signi cant in uence on the emitter-to-base breakdown voltage BVEBO and the emitter base leakage current ILEBO During an ESD event, as the reverse bias is applied, the emitter base depletion width increases [72,73].

11, (AC@, 9, WA,

Y (j w) = R[ I + j(I / R )( wL - I/ wC) ]

As the emitter is heavily doped, the depletion region extends laterally through the p-doped SiGe link resistance.

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